Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7175968 | Lithographic apparatus, device manufacturing method and a substrate | Johannes Catharinus Hubertus Mulkens, Bob Streefkerk | 2007-02-13 |
| 7170587 | Lithographic apparatus and device manufacturing method | Hans Van Der Laan, Hendrikus Robertus Marie Van Greevenbroek | 2007-01-30 |
| 7148952 | Lithographic apparatus and device manufacturing method | Markus Franciscus Antonius Eurlings, Johannes Jacobus Matheus Baselmans, Hako Botma, Jan Bruining, Antonius Johannes Josephus Van Dijsseldonk +1 more | 2006-12-12 |
| 7113261 | Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby | Markus Franciscus Antonius Eurlings, Olav Waldemar Vladimir Frijns | 2006-09-26 |
| 7108960 | Lithographic apparatus and device manufacturing method | — | 2006-09-19 |
| 7042550 | Device manufacturing method and computer program | Martin Lowisch, Koen Van Ingen Schenau, Hans Van Der Laan, Martinus Hendrikus Antonius Leenders, Elaine McCoo +1 more | 2006-05-09 |
| 7023524 | Lithographic apparatus and device manufacturing method | Antonius Johannes Josephus Van Dijsseldonk, Harm-Jan Voorma | 2006-04-04 |
| 6987275 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Jeroen Jonkers, Antonius Johannes Josephus Van Dijsseldonk | 2006-01-17 |
| 6927004 | Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method | Markus Franciscus Antonius Eurlings, Antonius Johannes Josephus Van Dijsseldonk | 2005-08-09 |
| 6771352 | Lithographic apparatus and device manufacturing method | — | 2004-08-03 |
| 6737662 | Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product | Heine Melle Mulder, Jan Bernard Plechelmus Van Schoot, Markus Franciscus Antonius Eurlings, Antonius Johannes Josephus Van Dijsseldonk | 2004-05-18 |
| 6710856 | Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby | Hans Van Der Laan, Hendrikus Robertus Marie Van Greevenbroek, Markus Franciscus Antonius Eurlings | 2004-03-23 |