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Method for controlling a lithographic system |
Oscar Franciscus Jozephus Noordman, Antonius Theodorus Wilhelmus Kempen, Marinus Aart Van Den Brink |
2024-09-24 |
| 11327403 |
Illumination optical system for projection lithography |
Tian Gang |
2022-05-10 |
| 10684551 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation |
Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more |
2020-06-16 |
| 10558126 |
Lithographic apparatus and method |
Sascha Migura, Bernhard Kneer |
2020-02-11 |
| 10317802 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation |
Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more |
2019-06-11 |
| 10289006 |
Beam delivery for EUV lithography |
Markus Franciscus Antonius Eurlings, Hermanus Johannes Maria Kreuwel |
2019-05-14 |
| 10248027 |
Projection system |
Hans Butler, Raoul Maarten Simon Knops, Bob Streefkerk, Christiaan Louis Valentin, Wilhelmus Franciscus Johannes Simons +4 more |
2019-04-02 |
| 10031423 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation |
Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more |
2018-07-24 |
| 10001709 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin +2 more |
2018-06-19 |
| 9989863 |
Lithographic system |
Andrei Mikhailovich Yakunin |
2018-06-05 |
| 9986628 |
Method and apparatus for generating radiation |
Erik Roelof Loopstra, Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Andrey Nikipelov, Edgar Alberto Osorio Oliveros +2 more |
2018-05-29 |
| 9958787 |
Lithographic method and apparatus |
Erik Roelof Loopstra, Timotheus Franciscus Sengers, Christiaan Louis Valentin, Antonius Johannes Josephus Van Dijsseldonk |
2018-05-01 |
| 9860966 |
Radiation source |
Antonius Theodorus Wilhelmus Kempen, Hermanus Johannes Maria Kreuwel, Andrei Mikhailovich Yakunin |
2018-01-02 |
| 9835950 |
Radiation source |
Markus Franciscus Antonius Eurlings, Niek Antonius Jacobus Maria Kleemans, Antonius Johannes Josephus Van Dijsseldonk, Ramon Mark Hofstra, Oscar Franciscus Jozephus Noordman +3 more |
2017-12-05 |
| 9785051 |
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices |
Sven Antoin Johan Hol, Edwin Johan Buis, Erik Maria Rekkers, Gosse Charles De Vries, Hako Botma +2 more |
2017-10-10 |
| 9746778 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation |
Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more |
2017-08-29 |
| 9632419 |
Radiation source |
Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors, Uwe Stamm +3 more |
2017-04-25 |
| 9618859 |
Lithographic apparatus and device manufacturing method |
Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Koen Jacobus Johannes Maria Zaal, Theodorus Petrus Maria Cadee |
2017-04-11 |
| 9594306 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +2 more |
2017-03-14 |
| 9411238 |
Source-collector device, lithographic apparatus, and device manufacturing method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Martinus Cornelis Maria Verhagen, Olav Waldemar Vladimir Frijns +5 more |
2016-08-09 |
| 9414477 |
Radiation source, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels |
2016-08-09 |
| 9372413 |
Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devices |
Gosse Charles De Vries, Franciscus Johannes Joseph Janssen, Nicolaas Aldegonda Jan Maria Van Aerle |
2016-06-21 |
| 9366967 |
Radiation source |
Andrei Mikhailovich Yakunin, Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Gerardus Hubertus Petrus Maria Swinkels |
2016-06-14 |
| 9363879 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +4 more |
2016-06-07 |
| 9329503 |
Multilayer mirror |
Vadim Iourievich Timoshkov, Antonius Theodorus Wilhelmus Kempen, Andrei Mikhailovich Yakunin, Edgar Alberto Osorio Oliveros |
2016-05-03 |