Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339583 | Optimization using a non-uniform illumination intensity profile | Janardan Nath, Christopher Mason, Duan-Fu Stephen Hsu, Todd R. Downey | 2025-06-24 |
| 11656555 | Lithographic apparatus and illumination uniformity correction system | Janardan Nath, Kalyan Kumar MANKALA, Todd R. Downey, Joseph H. Lyons, Ozer Unluhisarcikli +2 more | 2023-05-23 |
| 11327403 | Illumination optical system for projection lithography | Jan Bernard Plechelmus Van Schoot | 2022-05-10 |
| 10845706 | Mirror array | Marco Matheus Louis Steeghs, Mehdi Yousefi Moghaddam | 2020-11-24 |