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End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses |
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Lithographic apparatus and illumination uniformity correction system |
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Mask assembly |
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Mask assembly |
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Apparatus including a gas gauge and method of operating the same |
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| 9358696 |
Low and high pressure proximity sensors |
— |
2016-06-07 |
| 8390782 |
Multi nozzle proximity sensor employing common sensing and nozzle shaping |
— |
2013-03-05 |
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Reverse flow gas gauge proximity sensor |
— |
2012-03-27 |
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Fluid gauge proximity sensor and method of operating same using a modulated fluid flow |
Daniel N. Galburt, Earl William Ebert |
2011-08-30 |
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Parallel process focus compensation |
— |
2011-05-10 |
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Pressure sensor |
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Fluid gauge proximity sensor and method of operating same using a modulated fluid flow |
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2006-11-14 |
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System for automated focus measuring of a lithography tool |
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Virtual gauging method for use in lithographic processing |
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2006-05-23 |
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Gas gauge proximity sensor with a modulated gas flow |
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2006-04-04 |
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System and method for monitoring the topography of a wafer surface during lithographic processing |
— |
2006-01-10 |
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System for monitoring the topography of a wafer surface during lithographic processing |
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2005-12-27 |
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System and method for automated focus measuring of a lithography tool |
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2005-04-26 |
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Virtual gauging system for use in lithographic processing |
— |
2003-10-14 |