Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11327412 | Topography measurement system | Ronald Franciscus Herman Hugers, Paulus Antonius Andreas Teunissen | 2022-05-10 |
| 10429748 | Apparatus including a gas gauge and method of operating the same | Joseph H. Lyons, Erik Johan Arlemark, Nicolae Marian Ungureanu, James H. Walsh | 2019-10-01 |
| 9488465 | Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus | Laurent Khuat Duy, Lukasz Jerzy Macht, Erik Johan Koop | 2016-11-08 |
| 8384879 | Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system | Patrick David Vogelsang, Tom Van Zutphen | 2013-02-26 |
| 7830495 | Lithographic apparatus and position sensor | Olaf Hubertus Wilhelmus Van Bruggen, Marcel Koenraad Marie Baggen, Johannes Roland Dassel, Remko Wakker, Stoyan Nihtianov +4 more | 2010-11-09 |
| 7321416 | Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion | Andrej Makarovic, Lambertus Gerardus Maria Kessels, Stoyan Nihtianov, Petrus Wilhelmus Josephus Maria Kemper, Kamen Hristov Chilov | 2008-01-22 |