Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488465 | Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus | Martinus Cornelis Reijnen, Lukasz Jerzy Macht, Erik Johan Koop | 2016-11-08 |
| 9081302 | Inspection apparatus and method, lithographic apparatus and lithographic processing cell | Arie Jeffrey Den Boef | 2015-07-14 |
| 8675210 | Level sensor, lithographic apparatus, and substrate surface positioning method | Arie Jeffrey Den Boef, Jozef Petrus Henricus Benschop, Ralph Brinkhof, Willem Jurrianus Venema, Lukasz Jerzy Macht +1 more | 2014-03-18 |
| 8610898 | Self-referencing interferometer, alignment system, and lithographic apparatus | — | 2013-12-17 |
| 8570487 | Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate | Noud Jan Gilissen | 2013-10-29 |