Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9581916 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Martinus Hendrikus Antonius Leenders, Koen Jacobus Johannes Maria Zaal | 2017-02-28 |
| 9494875 | Chuck, a chuck control system, a lithography apparatus and a method of using a chuck | Sebastiaan Maria Johannes Cornelissen, Anko Jozef Cornelus Sijben, Roger W. Schmitz, Arnoud Willem Notenboom, Ronald Van Der Wilk +1 more | 2016-11-15 |
| 9366973 | Lithographic apparatus and device manufacturing method | David Christopher Ockwell | 2016-06-14 |
| 9188882 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Martinus Hendrikus Antonius Leenders, Koen Jacobus Johannes Maria Zaal | 2015-11-17 |
| 8810777 | Lithographic apparatus, a method for removing material of one or more protrusions on a support surface, and an article support system | Theodorus Petrus Maria Cadee, Rene Theodorus Petrus Compen, James Kennon | 2014-08-19 |
| 8597014 | Actuator | Theodorus Petrus Maria Cadee, Johannes Petrus Martinus Bernardus Vermeulen | 2013-12-03 |
| 8570487 | Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate | Laurent Khuat Duy | 2013-10-29 |
| 8411247 | Lithographic apparatus and positioning apparatus | Theodorus Petrus Maria Cadee | 2013-04-02 |
| 8274641 | Substrate table, lithographic apparatus and device manufacturing method | Eva Mondt, Hernes Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Marcus Martinus Petrus Adrianus Vermeulen +1 more | 2012-09-25 |
| 7978306 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Martinus Hendrikus Antonius Leenders | 2011-07-12 |
| 7656502 | Lithographic apparatus and device manufacturing method | Harmen Klaus Van Der Schoot, Peter Paul Steijaert, Erik Roelof Loopstra, Nicolaas Rudolf Kemper, Nicolaas Ten Kate +8 more | 2010-02-02 |
| 7492440 | Lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Edwin Johan Buis, Henrikus Herman Marie Cox, Harmen Klaas Van Der Schoot | 2009-02-17 |
| 7411657 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Martinus Hendrikus Antonius Leenders, Koen Jacobus Johannes Maria Zaal | 2008-08-12 |
| 7119884 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Jeroen Pieter Starreveld | 2006-10-10 |
| 7106416 | Lithographic apparatus and device manufacturing method | Wilhelmus Josephus Box, Joost Jeroen Ottens | 2006-09-12 |
| 7064808 | Substrate carrier and method for making a substrate carrier | Joost Jeroen Ottens, Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters | 2006-06-20 |
| 7057313 | Cooling of voice coil motors | Edwin Johan Buis, Yim-Bun Patrick Kwan, Paulus Schapendonk | 2006-06-06 |
| 7015491 | Lithographic apparatus, device manufacturing method and device manufactured thereby, control system | Markus Franciscus Antonius Eurlings | 2006-03-21 |
| 6956222 | Lithographic apparatus and method of manufacturing a device | Sjoerd Nicolaas Lambertus Donders, Martinus Hendrikus Antonius Leenders | 2005-10-18 |
| 6741329 | Lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors, Erik Roelof Loopstra, Markus Franciscus Antonius Eurlings | 2004-05-25 |
| 6657204 | Cooling of voice coil motors in lithographic projection apparatus | Edwin Johan Buis, Yim-Bun Patrick Kwan, Paulus Schapendonk | 2003-12-02 |