Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8411252 | Lithographic apparatus and device manufacturing method utilizing a substrate handler | Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Harmen Klaas Van Der Schoot | 2013-04-02 |
| 8174680 | Substrate handler, lithographic apparatus and device manufacturing method | Harmen Klaas Van Der Schoot, Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Johannes Martinus Andreas Hazenberg, Aart Adrianus Van Beuzekom | 2012-05-08 |
| 7656506 | Lithographic apparatus and device manufacturing method utilizing a substrate handler | Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Harmen Klaas Van Der Schoot | 2010-02-02 |
| 7576835 | Substrate handler, lithographic apparatus and device manufacturing method | Harmen Klaas Van Der Schoot, Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Johannes Martinus Andreas Hazenberg, Aart Adrianus Van Beuzekom | 2009-08-18 |
| 7538857 | Lithographic apparatus and device manufacturing method utilizing a substrate handler | Hernes Jacobs, Harmen Klaas Van Der Schoot, Bernardus Antonius Johannes Luttikhuis | 2009-05-26 |
| 7456935 | Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table | Henrikus Herman Marie Cox, Sven Antoin Johan Hol | 2008-11-25 |
| 7417711 | Lithographic apparatus and device manufacturing method | Hernes Jacobs, Henrikus Herman Marie Cox | 2008-08-26 |
| 7292317 | Lithographic apparatus and device manufacturing method utilizing substrate stage compensating | Henrikus Herman Marie Cox, Hernes Jacobs, Harmen Klaas Van Der Schoot | 2007-11-06 |
| 7256867 | Lithographic apparatus and device manufacturing method | Bernardus Antonius Johannes Luttikhuis, Harmen Klaas Van Der Schoot | 2007-08-14 |
| 7239369 | Lithographic apparatus and device manufacturing method | Hernes Jacobs, Henrikus Herman Marie Cox | 2007-07-03 |
| 7230254 | Movable carriage for a lithographic apparatus and device manufacturing method | Martinus Arnoldus Henricus Terken, Hernes Jacobs, Harmen Klaas Van Der Schoot, Koen Jacobus Johannes Maria Zaal | 2007-06-12 |
| 7072025 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Robertus Nicodemus Jacobus Van Ballegoij, Sven Antoin Johan Hol, Sebastiaan Maria Johannes Cornelissen | 2006-07-04 |
| 7064808 | Substrate carrier and method for making a substrate carrier | Noud Jan Gilissen, Joost Jeroen Ottens, Harmen Klaas Van Der Schoot | 2006-06-20 |
| 7012264 | Lithographic apparatus and device manufacturing method | Martinus Arnoldus Henricus Terken, Hernes Jacobs, Harmen Klaas Van Der Schoot, Koen Jacobus Johannes Maria Zaal | 2006-03-14 |
| 6995379 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Hernes Jacobs, Mark Van Heumen, Nicolaas Rudolf Kemper | 2006-02-07 |
| 6970230 | Lithographic apparatus and device manufacturing method | Hernes Jacobs, Harmen Klaas Van Der Schoot, Peter Rutgers | 2005-11-29 |
| 6906786 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Robertus Nicodemus Jacobus Van Ballegoij, Sven Antoin Johan Hol, Sebastiaan Maria Johannes Cornelissen | 2005-06-14 |
| 6815699 | Lithographic apparatus and device manufacturing method | Hernes Jacobs, Harmen Klaas Van Der Schoot, Ton De Groot | 2004-11-09 |