| 10705439 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2020-07-07 |
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Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2020-03-24 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2019-11-05 |
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Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2019-06-25 |
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Lithographic apparatus and a device manufacturing method |
Theodorus Wilhelmus Polet, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran +1 more |
2019-03-05 |
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Lithographic apparatus and device manufacturing method |
Mark Marcus Gerardus Heeren, Peter Michel Silvester Maria Heijmans, Jacob Jan Velten, Johannes Hubertus Antonius Van De Rijdt, Godfried Katharina Hubertus Franciscus Geelen +1 more |
2018-10-30 |
| 9977341 |
Lithographic apparatus and device manufacturing method |
— |
2018-05-22 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2018-02-27 |
| 9798246 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2017-10-24 |
| 9746788 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2017-08-29 |
| 9671702 |
Positioning system, a lithographic apparatus and a method for positional control |
Hans Butler |
2017-06-06 |
| 9507278 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2016-11-29 |
| 9488923 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2016-11-08 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2016-10-25 |
| 9274436 |
Lithographic apparatus and a device manufacturing method |
Theodorus Wilhelmus Polet, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Jimmy Matheus Wilhelmus Van De Winkel, Gregory Martin Mason Corcoran +1 more |
2016-03-01 |
| 9229339 |
Positioning system, a lithographic apparatus and a method for positional control |
Hans Butler |
2016-01-05 |
| 9097992 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2015-08-04 |
| 8982327 |
Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus |
Thomas Augustus Mattaar |
2015-03-17 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2015-02-24 |
| 8947640 |
Positioning device, lithographic apparatus, positioning method and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen |
2015-02-03 |
| 8755028 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2014-06-17 |
| 8749754 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2014-06-10 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8681316 |
Measurement system, method and lithographic apparatus |
Willem Herman Gertruda Anna Koenen, Thomas Augustus Mattaar, Martinus Theodorus Jacobus Pieterse, Rob Antonius Andries Verkooijen |
2014-03-25 |