| 7295283 |
Lithographic apparatus and device manufacturing method |
Petrus Marinus Christianus Maria Van Den Biggelaar, Frits Van Der Meulen, Franciscus Andreas Cornelis Johannes Spanjers, Jan-Gerard Cornelis Van Der Toorn, Arend-Jan Migchelbrink |
2007-11-13 |
| 7292317 |
Lithographic apparatus and device manufacturing method utilizing substrate stage compensating |
Hernes Jacobs, Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters |
2007-11-06 |
| 7265813 |
Lithographic apparatus and device manufacturing method |
Martijn Houkes, Hans Butler |
2007-09-04 |
| 7256866 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Ronald Casper Kunst, Harmen Klaas Van Der Schoot, Youssef Karel Maria De Vos |
2007-08-14 |
| 7245047 |
Lithographic apparatus and device manufacturing method |
Patricia Vreugdewater, Sven Antoin Johan Hol, Harmen Klaas Van Der Schoot |
2007-07-17 |
| 7239369 |
Lithographic apparatus and device manufacturing method |
Hernes Jacobs, Petrus Matthijs Henricus Vosters |
2007-07-03 |
| 7205741 |
Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method |
Wilhelmus Franciscus Johannes Simons, Sven Antoin Johan Hol |
2007-04-17 |
| 7193722 |
Lithographic apparatus with disturbance correction system and device manufacturing method |
Martinus Godefridus Helena Boogaarts, Hans Butler, Martinus Agnes Willem Cuijpers, Jan Jaap Kuit |
2007-03-20 |
| 7170580 |
Lithographic apparatus, projection system, method of projecting and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Leon Martin Levasier |
2007-01-30 |
| 7170583 |
Lithographic apparatus immersion damage control |
Frits Van Der Meulen, Martijn Houkes, Robertus Johannes Van Vliet, Stoyan Nihtianov, Petrus Wilhelmus Josephus Maria Kemper +1 more |
2007-01-30 |
| 7167234 |
Actuator assembly and lithographic apparatus comprising such an actuator assembly |
Sven Antoin Johan Hol, Hernes Jacobs |
2007-01-23 |
| 7145269 |
Lithographic apparatus, Lorentz actuator, and device manufacturing method |
Sven Antoin Johan Hol, Hernes Jacobs, Patricia Vreugdewater, Koen Jacobus Johannes Maria Zaal |
2006-12-05 |
| 7126671 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Nicolaas Rudolf Kemper, Engelbertus Antonius Fransiscus Van Der Pasch, Martijn Johannes Verbunt, Lambertus Adrianus Van Den Wildenberg |
2006-10-24 |
| 7119874 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Helmar Van Santen |
2006-10-10 |
| 7079226 |
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method |
Patricia Vreugdewater, Sven Antoin Johan Hol |
2006-07-18 |
| 7072025 |
Lithographic apparatus and device manufacturing method |
Robertus Nicodemus Jacobus Van Ballegoij, Petrus Matthijs Henricus Vosters, Sven Antoin Johan Hol, Sebastiaan Maria Johannes Cornelissen |
2006-07-04 |
| 7019816 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Joost Jeroen Ottens, Koen Jacobus Johannes Maria Zaal |
2006-03-28 |
| 7016013 |
Modulated lithographic beam to reduce sensitivity to fluctuating scanning speed |
Petrus Marinus Christianus Maria Van Der Biggelaar, Johannes Heintze, Tim Tso |
2006-03-21 |
| 7016019 |
Lithographic apparatus and device manufacturing method |
Petrus Marinus Christianus Maria Van Den Biggelaar, Yin Tim Tso, Sjoerd Nicolaas Lambertus Donders, Theodorus Knoops |
2006-03-21 |
| 7005823 |
Positioning system and positioning method |
Martijn Houkes, Ramidin Izair Kamidin, Patricia Vreugdewater |
2006-02-28 |
| 6906786 |
Lithographic apparatus and device manufacturing method |
Robertus Nicodemus Jacobus Van Ballegoij, Petrus Matthijs Henricus Vosters, Sven Antoin Johan Hol, Sebastiaan Maria Johannes Cornelissen |
2005-06-14 |