Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7016013 | Modulated lithographic beam to reduce sensitivity to fluctuating scanning speed | Petrus Marinus Christianus Maria Van Der Biggelaar, Henrikus Herman Marie Cox, Johannes Heintze | 2006-03-21 |