Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7868999 | Lithographic apparatus, source, source controller and control method | Erik Petrus Buurman, Mark Trentelman | 2011-01-11 |
| 7297911 | Lithographic apparatus, illumination system, illumination controller and control method | Stefan Geerte Kruijswijk, Paul Van Der Veen | 2007-11-20 |
| 7057705 | Lithographic apparatus, device manufacturing method, performance measuring method, calibration method and computer program | — | 2006-06-06 |
| 7016013 | Modulated lithographic beam to reduce sensitivity to fluctuating scanning speed | Petrus Marinus Christianus Maria Van Der Biggelaar, Henrikus Herman Marie Cox, Tim Tso | 2006-03-21 |