Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7924406 | Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels | Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers +2 more | 2011-04-12 |
| 7868999 | Lithographic apparatus, source, source controller and control method | Johannes Heintze, Erik Petrus Buurman | 2011-01-11 |
| 7671968 | Lithographic apparatus having masking parts and device manufacturing method | Erik Roelof Loopstra, Arno Jan Bleeker, Heine Melle Mulder, Oscar Franciscus Jozephus Noordman, Timotheus Franciscus Sengers +2 more | 2010-03-02 |
| 7432517 | Pulse modifier, lithographic apparatus, and device manufacturing method | Hako Botma, Joerg Bruebach, Adel Joobeur | 2008-10-07 |