| 10222702 |
Radiation source |
Arno Jan Bleeker, Ramon Mark Hofstra, Johannes Hubertus Josephina Moors, Alexander Matthijs Struycken, Harm-Jan Voorma +3 more |
2019-03-05 |
| 9316924 |
Lithographic apparatus, excimer laser and device manufacturing method |
Robertus Cornelis Martinus De Kruif, Richard Joseph Bruls, Johannes Wilhelmus Maria Cornelis Teeuwsen |
2016-04-19 |
| 9110377 |
Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Uwe Stamm |
2015-08-18 |
| 8663881 |
Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device |
Szilard Istvan Csiszar |
2014-03-04 |
| 8598551 |
EUV radiation source comprising a droplet accelerator and lithographic apparatus |
Wilbert Jan Mestrom, Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels |
2013-12-03 |
| 8462826 |
Laser device |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels |
2013-06-11 |
| 8431916 |
Radiation source and lithographic apparatus |
Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Gerardus Hubertus Petrus Maria Swinkels |
2013-04-30 |
| 8089613 |
Lithographic apparatus, excimer laser and device manufacturing method |
Robertus Cornelis Martinus De Kruif, Richard Joseph Bruls, Johannes Wilhelmus Maria Cornelis Teeuwsen |
2012-01-03 |
| 7868999 |
Lithographic apparatus, source, source controller and control method |
Johannes Heintze, Mark Trentelman |
2011-01-11 |
| 7817247 |
Lithographic apparatus, excimer laser and device manufacturing method |
Robertus Cornelis Martinus De Kruif, Richard Joseph Bruls, Johannes Wilhelmus Maria Cornelis Teeuwsen |
2010-10-19 |
| 7655367 |
Lithographic apparatus and device manufacturing method |
Thomas Josephus Maria Castenmiller, Johannes Wilhelmus Maria Cornelis Teeuwsen, Bearrach Moest, Marc Antonius Maria Haast |
2010-02-02 |
| 7595863 |
Lithographic apparatus, excimer laser and device manufacturing method |
Robertus Cornelis Martinus Kruif, Richard Joseph Bruls, Thomas Josephus Maria Castenmiller, Johannes Wilhelmus De Klerk |
2009-09-29 |
| 7525638 |
Lithographic apparatus and device manufacturing method |
Thomas Josephus Maria Castenmiller, Johannes Wilhelmus Maria Cornelis Teeuwsen, Bearrach Moest, Mare Antonius Maria Haast |
2009-04-28 |
| 7491478 |
Lithographic apparatus and device manufacturing method |
Jozef Maria Finders, Alexander Straaijer, J. W. De Klerk |
2009-02-17 |
| 7453551 |
Increasing pulse-to-pulse radiation beam uniformity |
Oscar Franciscus Jozephus Noordman |
2008-11-18 |