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Radiation source |
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2019-03-05 |
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Ex-situ removal of deposition on an optical element |
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2013-12-03 |
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Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun +4 more |
2012-03-13 |
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Method of preparing components, prepared component, lithographic apparatus and device manufacturing method |
Johannes Adrianus Antonius Theodorus Dams, Mark Kroon, Carolus Ida Maria Antonius Spee |
2011-12-13 |
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Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Mandeep Singh, Derk Jan Wilfred Klunder |
2011-01-25 |
| 7767989 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun +4 more |
2010-08-03 |
| 7470916 |
Lithographic apparatus, device manufacturing method and radiation collector |
Wilhelmus Josephus Box, Olav Waldemar Vladimir Frijns, Maurice Pierre Marie Arthur Limpens |
2008-12-30 |
| 7145640 |
Lithographic apparatus, device manufacturing method and variable attenuator |
Antonius Johannes Josephus Van Dijsseldonk, Uwe Mickan |
2006-12-05 |
| 7098994 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Johannes Hubertus Josephina Moors, Uwe Mickan, Johannes Christiaan Leonardus Franken |
2006-08-29 |
| 7023524 |
Lithographic apparatus and device manufacturing method |
Antonius Johannes Josephus Van Dijsseldonk, Marcel Mathijs Theodore Marie Dierichs |
2006-04-04 |