Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8598550 | Ex-situ removal of deposition on an optical element | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken +4 more | 2013-12-03 |
| 8134136 | Ex-situ removal of deposition on an optical element | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken +4 more | 2012-03-13 |
| 7767989 | Ex-situ removal of deposition on an optical element | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Harm-Jan Voorma, Vladimir Mihailovitch Krivtsun +4 more | 2010-08-03 |
| 7612353 | Lithographic apparatus, contaminant trap, and device manufacturing method | Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Josephus Jacobus Smits, Alexander Schmidt, Arnoud Cornelis Wassink +3 more | 2009-11-03 |
| 7525635 | Contamination barrier and lithographic apparatus | — | 2009-04-28 |
| 7368733 | Contamination barrier and lithographic apparatus comprising same | — | 2008-05-06 |
| 7173685 | Lithographic apparatus, a device manufacturing method, and a fastener for use in a lithographic apparatus | — | 2007-02-06 |
| 7126671 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Dominicus Jacobus Petrus Adrianus Franken, Nicolaas Rudolf Kemper, Engelbertus Antonius Fransiscus Van Der Pasch, Martijn Johannes Verbunt | 2006-10-24 |