| 9411250 |
Radiation system and lithographic apparatus |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Vladimir Vitalevich Ivanov |
2016-08-09 |
| 9411238 |
Source-collector device, lithographic apparatus, and device manufacturing method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen +5 more |
2016-08-09 |
| 9366967 |
Radiation source |
Andrei Mikhailovich Yakunin, Vladimir Vitalevich Ivanov, Viacheslav Medvedev, Gerardus Hubertus Petrus Maria Swinkels, Jan Bernard Plechelmus Van Schoot |
2016-06-14 |
| 9357626 |
Photon source, metrology apparatus, lithographic system and device manufacturing method |
Henricus Petrus Maria Pellemans, Pavel Stanislavovich Antsiferov, Johannes Matheus Marie De Wit, Ralph Jozef Johannes Gerardus Anna Maria SMEETS, Gerbrand Van Der Zouw |
2016-05-31 |
| 9307624 |
Lithographic apparatus |
Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev, Givi Georgievich Zukakishvili +3 more |
2016-04-05 |
| 9261784 |
Lithographic patterning process and resists to use therein |
Sander Frederik Wuister, Andrei Mikhailovich Yakunin |
2016-02-16 |
| 9007565 |
Spectral purity filter |
Andrei Mikhailovich Yakunin, Viacheslav Medvedev, Alexandre Kodentsov |
2015-04-14 |
| 8921814 |
Photon source, metrology apparatus, lithographic system and device manufacturing method |
Henricus Petrus Maria Pellemans, Pavel Stanislavovich Antsiferov, Johannes Matheus Marie De Wit, Ralph Josef Johannes Gerardus Anna M Smeets, Gerbrand Van Der Zouw |
2014-12-30 |
| 8755032 |
Radiation source and lithographic apparatus |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels +1 more |
2014-06-17 |
| 8598550 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Alexander Matthijs Struycken +4 more |
2013-12-03 |
| 8493548 |
Lithographic apparatus and device manufacturing method |
Vladimir Vitalevich Ivanov, Vadim Yevgenyevich Banine, Konstantin Nikolaevich Koshelev |
2013-07-23 |
| 8294128 |
Apparatus with plasma radiation source and method of forming a beam of radiation |
Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Evgeny Dmitrievich Korop, Konstantin Nikolaevich Koshelev, Yurii Victorovitch Sidelnikov +1 more |
2012-10-23 |
| 8134136 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Alexander Matthijs Struycken +4 more |
2012-03-13 |
| 7872244 |
Lithographic apparatus and device manufacturing method |
Vladimir Vitalevich Ivanov, Vadim Yevgenyevich Banine, Arno Jan Bleeker, Konstantin Nikolaevich Koshelev, Pavel Stanislavovich Antsiferov +1 more |
2011-01-18 |
| 7772570 |
Assembly for blocking a beam of radiation and method of blocking a beam of radiation |
Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev |
2010-08-10 |
| 7767989 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Harm-Jan Voorma, Lambertus Adrianus Van Den Wildenberg +4 more |
2010-08-03 |
| 7696492 |
Radiation system and lithographic apparatus |
Arnoud Cornelis Wassink, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Theodorus Petrus Maria Cadee +4 more |
2010-04-13 |
| 7557366 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine |
2009-07-07 |
| 7528395 |
Radiation source, lithographic apparatus and device manufacturing method |
Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine, Vladimir Vital'evitch Ivanov, Erik René Kieft, Erik Roelof Loopstra +5 more |
2009-05-05 |
| 7518134 |
Plasma radiation source for a lithographic apparatus |
Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev |
2009-04-14 |
| 7462851 |
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Robert Rafilevitch Gayazov |
2008-12-09 |
| 7372058 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Lambertus Adrianus Wildenberg, Alexander Matthijs Struycken, Johannes Bernardus Ridder, Vladimir Vitalevitch Ivanov +1 more |
2008-05-13 |
| 7335900 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Givi Georgievitch Zukavishvili, Robert Rafilevitch Gayazov |
2008-02-26 |
| 7061574 |
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby |
Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev |
2006-06-13 |