| 12028958 |
High-brightness laser produced plasma source and method of generation and collection radiation |
Samir Ellwi, Denis Aleksandrovich Glushkov, Vladimir Vitalievich Ivanov, Oleg Borisovich Khristoforov, Mikhail Sergeyevich Krivokorytov +4 more |
2024-07-02 |
| 11869742 |
X-ray source with rotating liquid-metal target |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +6 more |
2024-01-09 |
| 11252810 |
Short-wavelength radiation source with multisectional collector module and method of collecting radiation |
Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +6 more |
2022-02-15 |
| 10887973 |
High brightness laser-produced plasma light source |
Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +6 more |
2021-01-05 |
| 10638588 |
High-brightness laser produced plasma source and methods for generating radiation and mitigating debris |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +3 more |
2020-04-28 |
| 10588210 |
High brightness short-wavelength radiation source (variants) |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +6 more |
2020-03-10 |
| 9476841 |
High-brightness LPP EUV light source |
Pavel Stanislavovich Antsiferov, Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Mikhail Sergeyevich KRYVOKORYTOV, Vladimir Mikhailovich Krivtsun +7 more |
2016-10-25 |
| 9368337 |
Light source with laser pumping and method for generating radiation |
Pavel Stanislavovich Antsiferov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash |
2016-06-14 |
| 9357627 |
Light source with laser pumping and method for generating radiation |
Pavel Stanislavovich Antsiferov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash |
2016-05-31 |
| 9307624 |
Lithographic apparatus |
Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Givi Georgievich Zukakishvili, Vladimir Mihailovitch Krivtsun +3 more |
2016-04-05 |
| 8493548 |
Lithographic apparatus and device manufacturing method |
Vladimir Vitalevich Ivanov, Vadim Yevgenyevich Banine, Vladimir Mihailovitch Krivtsun |
2013-07-23 |
| 8294128 |
Apparatus with plasma radiation source and method of forming a beam of radiation |
Vladimir Mihailovitch Krivtsun, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Evgeny Dmitrievich Korop, Yurii Victorovitch Sidelnikov +1 more |
2012-10-23 |
| 7872244 |
Lithographic apparatus and device manufacturing method |
Vladimir Vitalevich Ivanov, Vadim Yevgenyevich Banine, Arno Jan Bleeker, Pavel Stanislavovich Antsiferov, Vladimir Mihailovitch Krivtsun +1 more |
2011-01-18 |
| 7825390 |
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus |
Vladimir Mihallovitch Krivtsun, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Evgeny Dmitrievich Korop, Yurii Victorovitch Sidelnikov +1 more |
2010-11-02 |
| 7772570 |
Assembly for blocking a beam of radiation and method of blocking a beam of radiation |
Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun |
2010-08-10 |
| 7518135 |
Reducing fast ions in a plasma radiation source |
Vladimir Ivanov, Vadim Yevgenyevich Banine |
2009-04-14 |