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X-ray source with rotating liquid-metal target |
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Short-wavelength radiation source with multisectional collector module and method of collecting radiation |
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High brightness laser-produced plasma light source |
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High-brightness laser produced plasma source and methods for generating radiation and mitigating debris |
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High brightness short-wavelength radiation source (variants) |
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| 9476841 |
High-brightness LPP EUV light source |
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| 6509701 |
Method and device for generating optical radiation |
Alexandr Tursunovich Rakhimov, Jury Alexandrovich Mankelevich, Tatiyana Viktorovna Rakhimova, Nikolai Vladislavovich Suetin |
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