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High-brightness laser produced plasma source and method of generation and collection radiation |
Samir Ellwi, Denis Aleksandrovich Glushkov, Vladimir Vitalievich Ivanov, Oleg Borisovich Khristoforov, Konstantin Nikolaevich Koshelev +4 more |
2024-07-02 |
| 11875986 |
Laser-pumped light source and method for laser ignition of plasma |
Dmitriy Borisovich Abramenko, Robert Rafilevich Gayasov, Denis Alexandrovich Glushkov, Yurii Borisovich Kiryukhin, Vladimir Mikhailovich Krivtsun |
2024-01-16 |
| 11869742 |
X-ray source with rotating liquid-metal target |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2024-01-09 |
| 11503696 |
Broadband laser-pumped plasma light source |
Dmitriy Borisovich Abramenko, Yurii Borisovich Kiryukhin, Denis Alexandrovich Glushkov, Vladimir Mikhailovich Krivtsun |
2022-11-15 |
| 11252810 |
Short-wavelength radiation source with multisectional collector module and method of collecting radiation |
Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2022-02-15 |
| 11191147 |
High-brightness laser-pumped plasma light source |
Dmitriy Borisovich Abramenko, Robert Rafilevich Gayasov, Denis Alexandrovich Glushkov, Vladimir Mikhailovich Krivtsun |
2021-11-30 |
| 10964523 |
Laser-pumped plasma light source and method for light generation |
Robert Rafilevich Gayasov, Denis Alexandrovich Glushkov, Yurii Borisovich Kiryukhin, Vladimir Mikhailovich Krivtsun |
2021-03-30 |
| 10887973 |
High brightness laser-produced plasma light source |
Vladimir Vitalievich Ivanov, Aleksandr Yurievich Vinokhodov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2021-01-05 |
| 10770282 |
Laser-pumped plasma light source and plasma ignition method |
Dmitry Borisovich Abramenko, Robert Rafilevich Gayasov, Yurii Borisovich Kiryukhin, Vladimir Mikhailovich Krivtsun |
2020-09-08 |
| 10638588 |
High-brightness laser produced plasma source and methods for generating radiation and mitigating debris |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +3 more |
2020-04-28 |
| 10588210 |
High brightness short-wavelength radiation source (variants) |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2020-03-10 |
| 9476841 |
High-brightness LPP EUV light source |
Pavel Stanislavovich Antsiferov, Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich KRYVOKORYTOV +7 more |
2016-10-25 |
| 9368337 |
Light source with laser pumping and method for generating radiation |
Pavel Stanislavovich Antsiferov, Konstantin Nikolaevich Koshelev, Vladimir Mikhailovich Krivtsun |
2016-06-14 |
| 9357627 |
Light source with laser pumping and method for generating radiation |
Pavel Stanislavovich Antsiferov, Konstantin Nikolaevich Koshelev, Vladimir Mikhailovich Krivtsun |
2016-05-31 |