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Laser-pumped light source and method for laser ignition of plasma |
Dmitriy Borisovich Abramenko, Robert Rafilevich Gayasov, Yurii Borisovich Kiryukhin, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash |
2024-01-16 |
| 11869742 |
X-ray source with rotating liquid-metal target |
Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun +6 more |
2024-01-09 |
| 11503696 |
Broadband laser-pumped plasma light source |
Dmitriy Borisovich Abramenko, Yurii Borisovich Kiryukhin, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash |
2022-11-15 |
| 11191147 |
High-brightness laser-pumped plasma light source |
Dmitriy Borisovich Abramenko, Robert Rafilevich Gayasov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash |
2021-11-30 |
| 10964523 |
Laser-pumped plasma light source and method for light generation |
Robert Rafilevich Gayasov, Yurii Borisovich Kiryukhin, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash |
2021-03-30 |
| 9964852 |
Source collector apparatus, lithographic apparatus and method |
Niek Antonius Jacobus Maria Kleemans, Ronald Johannes Hultermans, Benedictus Mathijs Renkens, Gerardus Hubertus Petrus Maria Swinkels, Christiaan Johannes Petrus Verspeek |
2018-05-08 |
| 9897930 |
Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element |
Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Andrei Mikhailovich Yakunin |
2018-02-20 |
| 9841680 |
Source collector apparatus, lithographic apparatus and method |
Niek Antonius Jacobus Maria Kleemans, Ronald Johannes Hultermans, Benedictus Mathijs Renkens, Gerardus Hubertus Petrus Maria Swinkels, Christiaan Johannes Petrus Verspeek |
2017-12-12 |
| 9476841 |
High-brightness LPP EUV light source |
Pavel Stanislavovich Antsiferov, Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich KRYVOKORYTOV +7 more |
2016-10-25 |
| 9448492 |
Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus |
Andrei Mikhailovich Yakunin, Vladimir Nikolaevich Polkovnikov, Nikolay Nikolaevitch Salashchenko, Leonid Aizikovitch Sjmaenok |
2016-09-20 |
| 9307624 |
Lithographic apparatus |
Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev, Givi Georgievich Zukakishvili, Vladimir Mihailovitch Krivtsun +3 more |
2016-04-05 |
| 9082521 |
EUV multilayer mirror with interlayer and lithographic apparatus using the mirror |
Vadim Yevgenyevich Banine, Leonid Aizikovitch Sjmaenok, Nikolay Nikolaevitch Salashchenko, Nikolay Ivanovich Chkhalo |
2015-07-14 |
| 8454849 |
Imprint lithography |
Sander Frederik Wuister, Vadim Yevgenyevich Banine, Arie Jeffrey Den Boef, Yvonne Wendela Kruijt-Stegeman, Tatyana Viktorovna Rakhimova +3 more |
2013-06-04 |