Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448492 | Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus | Andrei Mikhailovich Yakunin, Denis Alexandrovich Glushkov, Vladimir Nikolaevich Polkovnikov, Leonid Aizikovitch Sjmaenok | 2016-09-20 |
| 9082521 | EUV multilayer mirror with interlayer and lithographic apparatus using the mirror | Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Leonid Aizikovitch Sjmaenok, Nikolay Ivanovich Chkhalo | 2015-07-14 |
| 7639418 | Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Leonid Shmaenok | 2009-12-29 |
| 7372623 | Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Leonid Shmaenok | 2008-05-13 |