Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE44120 | Filter for extreme ultraviolet lithography | — | 2013-04-02 |
| 7639418 | Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Nikolay Nikolaevitch Salashchenko | 2009-12-29 |
| 7372623 | Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Nikolay Nikolaevitch Salashchenko | 2008-05-13 |
| 6359969 | Filter for extreme ultraviolet lithography | — | 2002-03-19 |