Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448492 | Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus | Andrei Mikhailovich Yakunin, Denis Alexandrovich Glushkov, Nikolay Nikolaevitch Salashchenko, Leonid Aizikovitch Sjmaenok | 2016-09-20 |