Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9897930 | Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element | Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Denis Alexandrovich Glushkov, Andrei Mikhailovich Yakunin | 2018-02-20 |
| 9529283 | Radiation source, lithographic apparatus, and device manufacturing method | Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors | 2016-12-27 |
| 9448492 | Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus | Andrei Mikhailovich Yakunin, Denis Alexandrovich Glushkov, Vladimir Nikolaevich Polkovnikov, Nikolay Nikolaevitch Salashchenko | 2016-09-20 |
| 9285690 | Mirror, lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Andrei Mikhailovich Yakunin | 2016-03-15 |
| 9082521 | EUV multilayer mirror with interlayer and lithographic apparatus using the mirror | Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Nikolay Nikolaevitch Salashchenko, Nikolay Ivanovich Chkhalo | 2015-07-14 |
| RE43036 | Filter for extreme ultraviolet lithography | — | 2011-12-20 |
| 7612353 | Lithographic apparatus, contaminant trap, and device manufacturing method | Vadim Yevgenyevich Banine, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Alexander Schmidt, Arnoud Cornelis Wassink +3 more | 2009-11-03 |
| 7397056 | Lithographic apparatus, contaminant trap, and device manufacturing method | Vadim Yevgenyevich Banine, Josephus Jacobus Smits, Lambertus Adrianus Van De Wildenberg, Alexander Schmidt, Arnoud Cornelis Wassink +2 more | 2008-07-08 |