| 8598550 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken +4 more |
2013-12-03 |
| 8289498 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Petrus Rutgerus Bartray, Leon Martin Levasier, Bernardus Antonius Johannes Luttikhuis, Anthonie Aantjes +7 more |
2012-10-16 |
| 8134136 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken +4 more |
2012-03-13 |
| 7767989 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Harm-Jan Voorma, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun +4 more |
2010-08-03 |
| 7612353 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Lambertus Adrianus Van Den Wildenberg, Alexander Schmidt, Arnoud Cornelis Wassink +3 more |
2009-11-03 |
| 7397056 |
Lithographic apparatus, contaminant trap, and device manufacturing method |
Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Lambertus Adrianus Van De Wildenberg, Alexander Schmidt, Arnoud Cornelis Wassink +2 more |
2008-07-08 |
| 7372058 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Lambertus Adrianus Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken, Johannes Bernardus Ridder +1 more |
2008-05-13 |
| 7116399 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Wilhelmus Josephus Box, Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +1 more |
2006-10-03 |
| 6750949 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors, Albrecht Hof +3 more |
2004-06-15 |