Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8269179 | Illumination system and filter system | Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Frank Jeroen Pieter Schuurmans | 2012-09-18 |
| 8018572 | Lithographic apparatus and radiation system | — | 2011-09-13 |
| 8018576 | Contamination prevention system, a lithographic apparatus, a radiation source and a method for manufacturing a device | — | 2011-09-13 |
| 7889312 | Apparatus comprising a rotating contaminant trap | Johannes Christiaan Leonardus Franken, Vadim Yevgenyevich Banine | 2011-02-15 |
| 7868304 | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Carolus Ida Maria Antonius Spee, Johannes Christiaan Leonardus Franken +1 more | 2011-01-11 |
| 7696492 | Radiation system and lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Theodorus Petrus Maria Cadee, Vladimir Mihailovitch Krivtsun +4 more | 2010-04-13 |
| 7612353 | Lithographic apparatus, contaminant trap, and device manufacturing method | Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Alexander Schmidt +3 more | 2009-11-03 |
| 7602472 | Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device | Edwin Johan Buis, Erik Theodorus Maria Bijlaart, Christiaan Alexander Hoogendam, Alexander Matthijs Struycken, Paul Peter Anna Antonius Brom | 2009-10-13 |
| 7485881 | Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system | Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Frank Jeroen Pieter Schuurmans | 2009-02-03 |
| 7453071 | Contamination barrier and lithographic apparatus comprising same | — | 2008-11-18 |
| 7442948 | Contamination barrier and lithographic apparatus | — | 2008-10-28 |
| 7426018 | Lithographic apparatus, illumination system and filter system | — | 2008-09-16 |
| 7397056 | Lithographic apparatus, contaminant trap, and device manufacturing method | Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Josephus Jacobus Smits, Lambertus Adrianus Van De Wildenberg, Alexander Schmidt +2 more | 2008-07-08 |
| 7365345 | Lithographic apparatus, radiation system and filter system | — | 2008-04-29 |
| 7233010 | Radiation system and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2007-06-19 |
| 7161653 | Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus | Levinus Pieter Bakker, Vadim Yevgenyevich Banine | 2007-01-09 |