Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11549180 | Apparatus and method for atomic layer deposition | Diederik Jan Maas, Bob Van Someren, Axel Sebastiaan Lexmond, Antonie Ellert Duisterwinkel, Adrianus Johannes Petrus Maria Vermeer | 2023-01-10 |
| 9502654 | Method of manufacturing a multilayer semiconductor element, and a semiconductor element manufactured as such | Paulus Wilhelmus Maria Blom, Jack W. Levell | 2016-11-22 |
| 8830446 | Exposure apparatus | Arjen Boogaard, Timotheus Franciscus Sengers, Wilhelmus Sebastianus Marcus Maria Ketelaars | 2014-09-09 |
| 8598550 | Ex-situ removal of deposition on an optical element | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun +4 more | 2013-12-03 |
| 8542341 | Exposure apparatus | Arjen Boogaard, Timotheus Franciscus Sengers, Wilhelmus Sebastianus Marcus Maria Ketelaars | 2013-09-24 |
| 8134136 | Ex-situ removal of deposition on an optical element | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun +4 more | 2012-03-13 |
| 8077287 | Method of preparing components, prepared component, lithographic apparatus and device manufacturing method | Johannes Adrianus Antonius Theodorus Dams, Mark Kroon, Harm-Jan Voorma | 2011-12-13 |
| 7935218 | Optical apparatus, lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Bastiaan Theodoor Wolschrijn, Rik Jansen | 2011-05-03 |
| 7868304 | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Johannes Christiaan Leonardus Franken, Arnoud Cornelis Wassink +1 more | 2011-01-11 |
| 7767989 | Ex-situ removal of deposition on an optical element | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Josephus Jacobus Smits, Harm-Jan Voorma, Lambertus Adrianus Van Den Wildenberg +4 more | 2010-08-03 |
| 7561247 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder, Antonius Maria Bernardus De Mol | 2009-07-14 |
| 7450217 | Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby | Arjen Boogaard, Timotheus Franciscus Sengers, Wilhelmus Sebastianus Marcus Maria Ketelaars | 2008-11-11 |
| 7414700 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Derk Jan Wilfred Klunder | 2008-08-19 |
| 7355672 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Derk Jan Wilfred Klunder | 2008-04-08 |
| 7075617 | Device manufacturing method and a lithographic apparatus | Aleksey Yurievich Kolesnychenko, Ralph Kurt | 2006-07-11 |
| 5837321 | Volatile organic lanthanide compounds and methods for the preparation of lanthanide-containing layered materials form these compounds | Klaas Timmer, Stephen Leonard Cook | 1998-11-17 |
| 5248787 | Volatile organic barium, strontium and calcium compounds | Klaas Timmer, Adrianus Mackor, Harmen A. Meinema | 1993-09-28 |