Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7561247 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Carolus Ida Maria Antonius Spee, Derk Jan Wilfred Klunder | 2009-07-14 |