Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11549180 | Apparatus and method for atomic layer deposition | Diederik Jan Maas, Bob Van Someren, Axel Sebastiaan Lexmond, Carolus Ida Maria Antonius Spee, Adrianus Johannes Petrus Maria Vermeer | 2023-01-10 |
| 6724460 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects | Willem Van Schaik, Bastiaan Mertens, Hans Meiling, Norbertus Benedictus Koster | 2004-04-20 |