Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9939737 | Electrostatic clamp | Petrus Augustinus Franciscus Klomp, Arnoud Willem Notenboom | 2018-04-10 |
| 7684012 | Lithographic device, device manufacturing method and device manufactured thereby | Johannes Henricus Wilhelmus Jacobs, Vadim Yevgenyevich Banine, Barrie Dudley Brewster, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors +2 more | 2010-03-23 |
| 7491951 | Lithographic apparatus, system and device manufacturing method | Marc Hubertus Lorenz Van Der Velden, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Markus Weiss, Bastiaan Theodoor Wolschrijn +1 more | 2009-02-17 |
| 7279690 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Johannes Hubertus Josephina Moors +4 more | 2007-10-09 |
| 7248340 | Lithographic apparatus and patterning device transport | Erik Ham, Robert Gabriël Maria Lansbergen, Ellart Alexander Meijer, Hendricus Johannes Maria Meijer, Hans Meiling +2 more | 2007-07-24 |
| 7151589 | Lithographic apparatus and patterning device transport | Erik Ham, Gert-Jan Heerens, Robert Gabriël Maria Lansbergen, Ellard Alexander Meijer, Hendricus Johannes Maria Meijer +2 more | 2006-12-19 |
| 7116394 | Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system | Levinus Pieter Bakker, Ralph Kurt, Markus Weiss, Johann Trenkler, Wolfgang Singer | 2006-10-03 |
| 7115886 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Willem Van Schaik, Hans Meiling, Norbertus Benedictus Koster | 2006-10-03 |
| 6862075 | Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby | Norbertus Benedictus Koster, Martinus Hendrikus Antonius Leenders, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2005-03-01 |
| 6828569 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Willem Van Schaik, Hans Meiling, Norbertus Benedictus Koster | 2004-12-07 |
| 6724460 | Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects | Willem Van Schaik, Antonie Ellert Duisterwinkel, Hans Meiling, Norbertus Benedictus Koster | 2004-04-20 |
| 6614505 | Lithographic projection apparatus, device manufacturing method, and device manufactured thereby | Norbertus Benedictus Koster, Martinus Hendrikus Antonius Leenders, Vladimir Vital'evitch Ivanov, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2003-09-02 |