Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359047 | Elongated permanent ring management with a plurality of axially directed magnetized zones and magnetic bearing with such a ring magnet | Andrew Waye | 2019-07-23 |
| 9759256 | Vacuum pump | Martin Ernst Tollner, Paul David Flower | 2017-09-12 |
| 9464667 | Magnetic bearing assembly formed by measuring first and second order transverse stray magnetic fields | Andrew Waye | 2016-10-11 |
| 8851829 | Vacuum pump | Martin Ernst Tollner, Paul David Flower | 2014-10-07 |
| 8662841 | Vacuum pump | Martin Ernst Tollner | 2014-03-04 |
| 8608459 | Vacuum pump | Ulrike Martina Hoefer, Andrew Waye | 2013-12-17 |
| 8322694 | Vibration isolator | Andrew Waye | 2012-12-04 |
| 8186937 | Vacuum pump | Chan-Cheong Siew | 2012-05-29 |
| 8181944 | Vibration damper | — | 2012-05-22 |
| 8021131 | Vacuum pump | Jennifer Mary Schooling | 2011-09-20 |
| 7684012 | Lithographic device, device manufacturing method and device manufactured thereby | Johannes Henricus Wilhelmus Jacobs, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Bastiaan Mertens, Johannes Hubertus Josephina Moors +2 more | 2010-03-23 |
| 7502095 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Henricus Wilhelmus Jacobs, Robert Gordon Livesey | 2009-03-10 |
| 7256863 | Sealing assembly, a lithographic projection apparatus, and a device manufacturing method | Robert Gordon Livesey, Johannes Henricus Wilhelmus Jacobs | 2007-08-14 |
| 7094036 | Vacuum pumping system | Darren Mennie, Ron C. Lee, Robert Bruce Grant, Joanne Rachel Greenwood | 2006-08-22 |
| 6200107 | Vacuum pumping systems | — | 2001-03-13 |