| 7878755 |
Load lock and method for transferring objects |
Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Josephus Cornelius Johannes Antonius Vugts, Johannes Hendrikus Gertrudis Franssen |
2011-02-01 |
| 7684012 |
Lithographic device, device manufacturing method and device manufactured thereby |
Johannes Henricus Wilhelmus Jacobs, Vadim Yevgenyevich Banine, Barrie Dudley Brewster, Vladimir Vitalevitch Ivanov, Bastiaan Mertens +2 more |
2010-03-23 |
| 7576831 |
Method and apparatus for maintaining a machine part |
Pieter Johannes Marius Van Groos, Jan Frederik Hoogkamp, Josephus Cornelius Johannes Antonius Vugts, Johannes Hendrikus Gertrudis Franssen, Albert Jan Hendrik Klomp +2 more |
2009-08-18 |
| 7502095 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Johannes Henricus Wilhelmus Jacobs, Barrie Dudley Brewster |
2009-03-10 |
| 7423721 |
Lithographic apparatus |
Antonius Johannes Josephus Van Dijsseldonk, Mustafa Amhaouch, Wilhelmus Josephus Box, Johannes Henricus Wilhelmus Jacobs, Hernes Jacobs +3 more |
2008-09-09 |
| 7359031 |
Lithographic projection assembly, load lock and method for transferring objects |
Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Josephus Cornelius Johannes Antonius Vugts, Johannes Hendrikus Gertrudis Franssen |
2008-04-15 |
| 7256863 |
Sealing assembly, a lithographic projection apparatus, and a device manufacturing method |
Barrie Dudley Brewster, Johannes Henricus Wilhelmus Jacobs |
2007-08-14 |