| 9500953 |
Radiation source |
Bastiaan Stephanus Hendricus Jansen, Maurice Willem Jozef Etiënne Wijckmans |
2016-11-22 |
| 7878755 |
Load lock and method for transferring objects |
Albert Jan Hendrik Klomp, Josephus Cornelius Johannes Antonius Vugts, Robert Gordon Livesey, Johannes Hendrikus Gertrudis Franssen |
2011-02-01 |
| 7576831 |
Method and apparatus for maintaining a machine part |
Pieter Johannes Marius Van Groos, Josephus Cornelius Johannes Antonius Vugts, Robert Gordon Livesey, Johannes Hendrikus Gertrudis Franssen, Albert Jan Hendrik Klomp +2 more |
2009-08-18 |
| 7486384 |
Lithographic support structure |
Patricius Aloysius Jacobus Tinnemans, Edwin Johan Buis, Sjoerd Nicolaas Lambertus Donders, Jan Van Elp, Aschwin Lodewijk Hendricus Johannes Van Meer +8 more |
2009-02-03 |
| 7459701 |
Stage apparatus, lithographic apparatus and device manufacturing method |
Marcel Koenraad Marie Baggen, Dirk-Jan Bijvoet, Sjoerd Nicolaas Lambertus Donders, Albert Johannes Maria Jansen, Jan Jaap Kuit +4 more |
2008-12-02 |
| 7408615 |
Lithographic apparatus and device manufacturing method |
Jan Jaap Kuit, Petrus Rutgerus Bartray, Dirk-Jan Bijvoet |
2008-08-05 |
| 7394520 |
Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock |
Albert Jan Hendrik Klomp, Raimond Visser, Josephus Cornelius Johannes Antonius Vugts, Henricus Johannes Louis Marie Vullings, Leo Wilhelmus Maria Kuipers +1 more |
2008-07-01 |
| 7394525 |
Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method |
Jan Jaap Kuit, Hubert Marie Segers, Raimond Visser, Johannes Maquine |
2008-07-01 |
| 7359031 |
Lithographic projection assembly, load lock and method for transferring objects |
Albert Jan Hendrik Klomp, Josephus Cornelius Johannes Antonius Vugts, Robert Gordon Livesey, Johannes Hendrikus Gertrudis Franssen |
2008-04-15 |
| 7349067 |
Lithographic apparatus and device manufacturing method |
Jan Jaap Kuit, Petrus Rutgerus Bartray, Dirk-Jan Bijvoet |
2008-03-25 |
| 7345736 |
Lithographic apparatus and device manufacturing method |
Jan Jaap Kuit, Petrus Rutgerus Bartray, Dirk-Jan Bijvoet |
2008-03-18 |
| 7131999 |
Lithographic apparatus and device manufacturing method |
Jan Jaap Kuit, Raimond Visser |
2006-11-07 |
| 7123349 |
Lithographic projection assembly, substrate handling apparatus and substrate handling method |
Pieter Johannes Marius Van Groos, Pieter Renaat Maria Hennus, Albert Jan Hendrik Klomp, Johannes Onvlee, Raimond Visser |
2006-10-17 |
| 7106420 |
Lithographic apparatus and device manufacturing method |
Jan Jaap Kuit, Dirk-Jan Bijvoet, Hubert Marie Segers, Raimond Visser, Johannes Maquine |
2006-09-12 |