Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10007197 | Sensor system, substrate handling system and lithographic apparatus | Joeri Lof, Joost Kauffman, Martin Dieter Nico Peters, Petrus Theodorus Rutgers, Martijn Hendrikus Wilhelmus Stopel +2 more | 2018-06-26 |
| 8064730 | Device manufacturing method, orientation determination method and lithographic apparatus | Leo Wilhelmus Maria Kuipers | 2011-11-22 |
| 7486384 | Lithographic support structure | Patricius Aloysius Jacobus Tinnemans, Edwin Johan Buis, Sjoerd Nicolaas Lambertus Donders, Jan Van Elp, Jan Frederik Hoogkamp +8 more | 2009-02-03 |
| 7408618 | Lithographic apparatus substrate alignment | — | 2008-08-05 |
| 7394520 | Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock | Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Josephus Cornelius Johannes Antonius Vugts, Henricus Johannes Louis Marie Vullings, Leo Wilhelmus Maria Kuipers +1 more | 2008-07-01 |
| 7394525 | Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method | Jan Jaap Kuit, Jan Frederik Hoogkamp, Hubert Marie Segers, Johannes Maquine | 2008-07-01 |
| 7307695 | Method and device for alignment of a substrate | Johannes Martinus Andreas Hazenberg, Patricius Aloysius Jacobus Tinnemans | 2007-12-11 |
| 7283225 | Particle detection device, lithographic apparatus and device manufacturing method | Johannes Onvlee, Peter Greve, Johannes Hendrikus Gertrudis Franssen, Erwin Theodorus Jacoba Verhagen | 2007-10-16 |
| 7131999 | Lithographic apparatus and device manufacturing method | Jan Frederik Hoogkamp, Jan Jaap Kuit | 2006-11-07 |
| 7123349 | Lithographic projection assembly, substrate handling apparatus and substrate handling method | Pieter Johannes Marius Van Groos, Pieter Renaat Maria Hennus, Jan Frederik Hoogkamp, Albert Jan Hendrik Klomp, Johannes Onvlee | 2006-10-17 |
| 7106420 | Lithographic apparatus and device manufacturing method | Jan Jaap Kuit, Dirk-Jan Bijvoet, Jan Frederik Hoogkamp, Hubert Marie Segers, Johannes Maquine | 2006-09-12 |
| 5881430 | Vacuum cleaner with power control in dependence on a mode of operation of an electrical brush | Johannes A.T. Driessen, Michiel A. A. Schallig | 1999-03-16 |