Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8928860 | Lithographic apparatus having a chuck with a visco-elastic damping layer | Peter Paul HEMPENIUS, Youssef Karel Maria De Vos, Ramidin Izair Kamidi | 2015-01-06 |
| 8830442 | Servo control system, lithographic apparatus and control method | Youssef Karel Maria De Vos, Ronald Casper Kunst, Ramidin Izair Kamidi, Khalid Manssouri | 2014-09-09 |
| 8400617 | Lithographic apparatus having a substrate support with open cell plastic foam parts | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Igor Matheus Petronella Aarts | 2013-03-19 |
| 8384881 | Lithographic apparatus, stage apparatus and device manufacturing method | Joost Jeroen Ottens, Gerbrand Van Der Zouw, Frederik Eduard De Jong | 2013-02-26 |
| 8345265 | Lithographic apparatus and methods for compensating substrate unflatness, determining the effect of patterning device unflatness, and determining the effect of thermal loads on a patterning device | — | 2013-01-01 |
| 8330940 | Lithographic apparatus, device manufacturing method and position control method | — | 2012-12-11 |
| 7933000 | Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning device | Johannes Onvlee | 2011-04-26 |
| 7884919 | Lithographic apparatus and device manufacturing method | Peter Paul HEMPENIUS, Marcel Koenraad Marie Baggen, Sjoerd Nicolaas Lambertus Donders, Youssef Karel Maria De Vos | 2011-02-08 |
| 7733463 | Lithographic apparatus and device manufacturing method | Marcel Koenraad Marie Baggen, Arjan Martin Van Der Wel | 2010-06-08 |
| 7675607 | Lithographic apparatus and device manufacturing method | Andre Bernardus Jeunink, Marcel Koenraad Marie Baggen, Thomas Josephus Maria Castenmiller | 2010-03-09 |
| 7633600 | Lithographic apparatus and device manufacturing method | Johannes Onvlee | 2009-12-15 |
| 7525636 | Lithographic apparatus and exposure method | Anton Adriaan Bijnagte | 2009-04-28 |
| 7459701 | Stage apparatus, lithographic apparatus and device manufacturing method | Marcel Koenraad Marie Baggen, Sjoerd Nicolaas Lambertus Donders, Jan Frederik Hoogkamp, Albert Johannes Maria Jansen, Jan Jaap Kuit +4 more | 2008-12-02 |
| 7408615 | Lithographic apparatus and device manufacturing method | Jan Jaap Kuit, Petrus Rutgerus Bartray, Jan Frederik Hoogkamp | 2008-08-05 |
| 7372549 | Lithographic apparatus and device manufacturing method | — | 2008-05-13 |
| 7355677 | System and method for an improved illumination system in a lithographic apparatus | — | 2008-04-08 |
| 7349067 | Lithographic apparatus and device manufacturing method | Jan Jaap Kuit, Petrus Rutgerus Bartray, Jan Frederik Hoogkamp | 2008-03-25 |
| 7345736 | Lithographic apparatus and device manufacturing method | Jan Jaap Kuit, Petrus Rutgerus Bartray, Jan Frederik Hoogkamp | 2008-03-18 |
| 7151591 | Alignment system, alignment method, and lithographic apparatus | — | 2006-12-19 |
| 7106420 | Lithographic apparatus and device manufacturing method | Jan Jaap Kuit, Jan Frederik Hoogkamp, Hubert Marie Segers, Raimond Visser, Johannes Maquine | 2006-09-12 |