Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088756 | Lithographic apparatus and method | Sander Kerssemakers, Wilhelmus Petrus De Boeij, Gerben Frank DE LANGE, Christiaan Alexander Hoogendam, Petrus Franciscus Van Gils +2 more | 2018-10-02 |
| 9134631 | Lithographic apparatus and device manufacturing method | Frank Staals, Alexander Hendrikus Martinus Van Der Hoff | 2015-09-15 |
| 9122174 | Method of loading a substrate on a substrate table and lithographic apparatus and device manufacturing method | Nick Snijders | 2015-09-01 |
| 8947636 | Lithographic apparatus, device manufacturing method, and substrate exchanging method | Theodorus Petrus Maria Cadee, Johannes Catharinus Hubertus Mulkens, Koen Jacobus Johannes Maria Zaal | 2015-02-03 |
| 8854598 | Lithographic apparatus and device manufacturing method | Doede Frans Kuiper | 2014-10-07 |
| 8634058 | Lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts | 2014-01-21 |
| 8446566 | Method of loading a substrate on a substrate table and lithographic apparatus and device manufacturing method | Niek Snijders | 2013-05-21 |
| 7459701 | Stage apparatus, lithographic apparatus and device manufacturing method | Marcel Koenraad Marie Baggen, Dirk-Jan Bijvoet, Sjoerd Nicolaas Lambertus Donders, Jan Frederik Hoogkamp, Albert Johannes Maria Jansen +4 more | 2008-12-02 |
| 7440076 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Peter Schaap | 2008-10-21 |
| 7423722 | Lithographic apparatus and device manufacturing method | Albert Johannes Maria Jansen, Erik Roelof Loopstra, Raymond Laurentius Johannes Schrijver | 2008-09-09 |
| 7408615 | Lithographic apparatus and device manufacturing method | Petrus Rutgerus Bartray, Dirk-Jan Bijvoet, Jan Frederik Hoogkamp | 2008-08-05 |
| 7394525 | Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method | Jan Frederik Hoogkamp, Hubert Marie Segers, Raimond Visser, Johannes Maquine | 2008-07-01 |
| 7349067 | Lithographic apparatus and device manufacturing method | Petrus Rutgerus Bartray, Dirk-Jan Bijvoet, Jan Frederik Hoogkamp | 2008-03-25 |
| 7345736 | Lithographic apparatus and device manufacturing method | Petrus Rutgerus Bartray, Dirk-Jan Bijvoet, Jan Frederik Hoogkamp | 2008-03-18 |
| 7193722 | Lithographic apparatus with disturbance correction system and device manufacturing method | Martinus Godefridus Helena Boogaarts, Hans Butler, Henrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers | 2007-03-20 |
| 7151590 | Transport system for a lithographic apparatus and device manufacturing method | — | 2006-12-19 |
| 7136147 | Lithographic apparatus and device manufacturing method | — | 2006-11-14 |
| 7131999 | Lithographic apparatus and device manufacturing method | Jan Frederik Hoogkamp, Raimond Visser | 2006-11-07 |
| 7130019 | Lithographic apparatus and device manufacturing method | Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Carlo Cornelis Maria Luijten, Bernardus Antonius Johannes Luttikhuis, Michael Ten Bhomer +1 more | 2006-10-31 |
| 7106420 | Lithographic apparatus and device manufacturing method | Dirk-Jan Bijvoet, Jan Frederik Hoogkamp, Hubert Marie Segers, Raimond Visser, Johannes Maquine | 2006-09-12 |
| 6414744 | Mask handling apparatus for lithographic projection apparatus | Doede Frans Kuiper | 2002-07-02 |
| 6406834 | Lithographic projection method | Jan A. M. Smits, Judocus Marie Dominicus Stoeldraijer | 2002-06-18 |