Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9983489 | Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation | Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Adrianus Hendrik Koevoets +3 more | 2018-05-29 |
| 7724351 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Erik Roelof Loopstra, Adrianus Franciscus Petrus Engelen, Bernardus Antonius Johannes Luttikhuis, Maria Johanna Agnes Rubingh, Johannes Martinus Andreas Hazenberg +7 more | 2010-05-25 |
| 7459701 | Stage apparatus, lithographic apparatus and device manufacturing method | Marcel Koenraad Marie Baggen, Dirk-Jan Bijvoet, Sjoerd Nicolaas Lambertus Donders, Jan Frederik Hoogkamp, Albert Johannes Maria Jansen +4 more | 2008-12-02 |
| 7440076 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Jan Jaap Kuit | 2008-10-21 |