| 11740566 |
Lithography apparatus |
Paulus Albertus Van Hal, Beatriz Seoane De La Cuesta |
2023-08-29 |
| RE49142 |
Lithographic apparatus and an object positioning system |
Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs, Putra SAPUTRA +4 more |
2022-07-19 |
| RE49066 |
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus |
Raymond Wilhelmus Louis Lafarre, Michael L. Nelson, Jacobus Cornelis Gerardus Van Der Sanden, Geoffrey O'Connor, Michael Andrew Chieda +1 more |
2022-05-10 |
| 11287752 |
Cooling apparatus and plasma-cleaning station for cooling apparatus |
Cornelis Adrianus De Meijere, Willem Michiel De Rapper, Sjoerd Nicolaas Lambertus Donders, Jan Groenewold, Alain Louis Claude Leroux +4 more |
2022-03-29 |
| 10955595 |
Multilayer reflector, method of manufacturing a multilayer reflector and lithographic apparatus |
Koos Van Berkel |
2021-03-23 |
| 10935895 |
Lithographic apparatus |
Erik Johan Arlemark, Sander Catharina Reinier Derks, Sjoerd Nicolaas Lambertus Donders, Wilfred Edward Endendijk, Franciscus Johannes Joseph Janssen +5 more |
2021-03-02 |
| 10747125 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2020-08-18 |
| 10747127 |
Lithographic apparatus |
Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more |
2020-08-18 |
| 10712678 |
Imprint lithography apparatus and method |
Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink, Arie Jeffrey Den Boef, Vadim Yevgenyevich Banine, Michael Jozef Mathijs Renkens +5 more |
2020-07-14 |
| 10416574 |
Lithographic apparatus |
Sander Catharina Reinier Derks, Franciscus Johannes Joseph Janssen, Jim Vincent Overkamp, Jacobus Cornelis Gerardus Van Der Sanden |
2019-09-17 |
| 10394140 |
Lithographic apparatus |
Hendrikus Herman Marie Cox, Paul Corné Henri DE WIT, Arie Jeffrey Den Boef, Jim Vincent Overkamp, Frits Van Der Meulen +1 more |
2019-08-27 |
| 10324383 |
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus |
Raymond Wilhelmus Louis Lafarre, Michael L. Nelson, Jacobus Cornelius Gerardus Van Der Sanden, Geoffrey O'Connor, Michael Andrew Chieda +1 more |
2019-06-18 |
| 10120292 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2018-11-06 |
| 10018926 |
Lithographic apparatus and method of manufacturing a lithographic apparatus |
Rogier Hendrikus Magdalena Cortie, Christianus Wilhelmus Johannes Berendsen, Andre Bernardus Jeunink, Jim Vincent Overkamp, Siegfried Alexander Tromp +2 more |
2018-07-10 |
| 9983489 |
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation |
Christianus Wilhelmus Johannes Berendsen, Marcel Beckers, Henricus Jozef Castelijns, Hubertus Antonius Geraets, Leon Martin Levasier +3 more |
2018-05-29 |
| 9939738 |
Lithographic apparatus and an object positioning system |
Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs, Putra SAPUTRA +4 more |
2018-04-10 |
| 9696640 |
Lithographic apparatus |
Theodorus Petrus Maria Cadee, Harmeet Singh |
2017-07-04 |
| 9684249 |
Lithographic apparatus with a metrology system for measuring a position of a substrate table |
Sjoerd Nicolaas Lambertus Donders, Theodorus Petrus Maria Cadee |
2017-06-20 |
| 9618859 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Jan Bernard Plechelmus Van Schoot, Koen Jacobus Johannes Maria Zaal, Theodorus Petrus Maria Cadee |
2017-04-11 |
| 9507275 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2016-11-29 |
| 9310700 |
Lithography method and apparatus |
Michael Jozef Mathijs Renkens, Sander Frederik Wuister |
2016-04-12 |
| 9122173 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens +4 more |
2015-09-01 |
| 8922756 |
Position measurement system, lithographic apparatus and device manufacturing method |
Willem Herman Gertruda Anna Koenen, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Robbert Edgar Van Leeuwen |
2014-12-30 |
| 8300208 |
Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatus |
Erik Roelof Loopstra, Maurice Willem Jozef Etiënne Wijckmans, Robertus Leonardus Tousain |
2012-10-30 |
| 8144310 |
Positioning system, lithographic apparatus and device manufacturing method |
Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens +4 more |
2012-03-27 |