| RE49066 |
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Geoffrey O'Connor, Michael Andrew Chieda +1 more |
2022-05-10 |
| 11287752 |
Cooling apparatus and plasma-cleaning station for cooling apparatus |
Adrianus Hendrik Koevoets, Cornelis Adrianus De Meijere, Willem Michiel De Rapper, Sjoerd Nicolaas Lambertus Donders, Jan Groenewold +4 more |
2022-03-29 |
| 10935895 |
Lithographic apparatus |
Adrianus Hendrik Koevoets, Erik Johan Arlemark, Sander Catharina Reinier Derks, Sjoerd Nicolaas Lambertus Donders, Wilfred Edward Endendijk +5 more |
2021-03-02 |
| 10747127 |
Lithographic apparatus |
Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more |
2020-08-18 |
| 10416574 |
Lithographic apparatus |
Adrianus Hendrik Koevoets, Sander Catharina Reinier Derks, Franciscus Johannes Joseph Janssen, Jim Vincent Overkamp |
2019-09-17 |
| 10394140 |
Lithographic apparatus |
Hendrikus Herman Marie Cox, Paul Corné Henri DE WIT, Arie Jeffrey Den Boef, Adrianus Hendrik Koevoets, Jim Vincent Overkamp +1 more |
2019-08-27 |
| 7779433 |
3D actuator for optical disc system |
Joannes Antonius van Rooij, Bart Hendriks, Jadranko Dovic, Bernardus Johannes Stinesen, Hendrik Goossens |
2010-08-17 |
| 6719499 |
Device for positioning a wafer |
Vladimir Kuznetsov, Sijbrand Radelaar, Theo Anjes Maria Ruijl |
2004-04-13 |
