| 11003095 |
Positioning system and lithographic apparatus |
Krijn Frederik Bustraan, Yang-Shan Huang, Antonius Franciscus Johannes De Groot, Minkyu Kim, Jasper Anne Frido Marikus Simons +1 more |
2021-05-11 |
| 10228626 |
Movable support and lithographic apparatus |
Antonius Franciscus Johannes De Groot, Christiaan Louis Valentin, Christian Werner |
2019-03-12 |
| 9897926 |
Stage positioning system and lithographic apparatus |
Wilhelmus Henricus Theodorus Maria Aangenent, Lucas Koorneef, Stanley Constant Johannes Martinus Van Den Berg, Stan Henricus Van Der Meulen, Jan Van Eijk +2 more |
2018-02-20 |
| 9326594 |
Position sensing toothbrush |
Johannes Hotze Bernhard De Vries, Evert Alle Helfrich, Pieter Johannes Bax, Chad Brinckerhoff, Sandor Gordijn |
2016-05-03 |
| 9192271 |
Suction unit and autonomous vacuum cleaner |
Jeroen Dekkers, Silvester Matheus Reijnders, Jan Van Eijk, Hubert Gerard Jean Joseph Amaury Vroomen, Thomas Petrus Hendricus Warmerdam +1 more |
2015-11-24 |
| 9049920 |
Position sensing toothbrush |
Johannes Hotze Bernhard De Vries, Evert Alle Helfrich, Pieter Johannes Bax, Chad Brinckherhoff, Sandor Gordijn |
2015-06-09 |
| 8091694 |
Actuator arrangement for active vibration isolation comprising an inertial reference mass |
Michael Johannes Vervoordeldonk, Robertus Mathijs Gerardus Rijs, Johannes Müller |
2012-01-10 |
| 7902494 |
System for detecting motion of a body |
Ronatus Gerardus Klaver, Michael Josepha Mathijs Renkens, Jan Van Eijk |
2011-03-08 |
| 7351293 |
Method and device for rotating a wafer |
Vladimir Kuznetsov, Sijbrand Radelaar, Jacobus Cornells Gerardus Van Der Sanden |
2008-04-01 |
| 7316076 |
Coordinate measuring device and a method for measuring the position of an object |
Jeroen Dekkers |
2008-01-08 |
| 7284907 |
Gas bearing system |
— |
2007-10-23 |
| 7178253 |
Coordinate measuring device with a vibration damping system |
Jeroen Dekkers |
2007-02-20 |
| 7119886 |
Lithographic apparatus, device manufacturing method, and angular encoder |
Martinus Hendrikus Antonius Leenders, Hendricus Johannes Maria Meijer, Engelbertus Antonius Fransiscus Van Der Pasch, Michael Jozef Mathijs Renkens |
2006-10-10 |
| 6857195 |
Apparatus for the measurement or machining of an object, provided with a displacement stage with wedge-shaped guides |
— |
2005-02-22 |
| 6824619 |
Method and device for rotating a wafer |
Vladimir Kuznetsov, Sijbrand Radelaar, Jacobus Cornells Gerardus Van Der Sanden |
2004-11-30 |
| 6719499 |
Device for positioning a wafer |
Vladimir Kuznetsov, Sijbrand Radelaar, Jacobus Cornelis Gerardus Van Der Sanden |
2004-04-13 |
| 6662462 |
Precision measuring apparatus provided with a metrology frame with a thermal shield consisting of at least two layers |
— |
2003-12-16 |
