| 10904994 |
Supply system for an extreme ultraviolet light source |
Koen Gerhardus Winkels, Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven |
2021-01-26 |
| 10750604 |
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus |
Johan Frederik Dijksman, Ronald Johannes Hultermans, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Peter van Putten |
2020-08-18 |
| 10499485 |
Supply system for an extreme ultraviolet light source |
Koen Gerhardus Winkels, Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven |
2019-12-03 |
| 10481498 |
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus |
Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko +4 more |
2019-11-19 |
| 10401743 |
Control system, positioning system, lithographic apparatus and device manufacturing method |
Jeroen Johannes Theodorus Hendrikus De Best, Stan Henricus Van Der Meulen |
2019-09-03 |
| 10095123 |
Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program |
Marinus Maria Johannes Van De Wal, Jeroen Johannes Theodorus Hendrikus De Best, Jan Van Eijk |
2018-10-09 |
| 9927721 |
Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method |
Hans Butler, Nic Jasper Dirkx, Ramidin Izair Kamidi, Wilhelmus Franciscus Johannes Simons |
2018-03-27 |
| 9897926 |
Stage positioning system and lithographic apparatus |
Lucas Koorneef, Theo Anjes Maria Ruijl, Stanley Constant Johannes Martinus Van Den Berg, Stan Henricus Van Der Meulen, Jan Van Eijk +2 more |
2018-02-20 |
| 9715182 |
Lithographic apparatus, substrate support system, device manufacturing method and control program |
Marinus Maria Johannes Van De Wal, Ramidin Izair Kamidi, Khalid Manssouri |
2017-07-25 |
| 9507277 |
Lithographic apparatus and device manufacturing method |
Johannes Petrus Martinus Bernardus Vermeulen, Ruud Antonius Catharina Maria Beerens, Rick Scholte, Ines Lopez Arteaga |
2016-11-29 |
| 9494869 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more |
2016-11-15 |
| 9383659 |
Positioning system, lithographic apparatus and device manufacturing method |
Ruud Antonius Catharina Maria Beerens, Andre Bernardus Jeunink, Marinus Maria Johannes Van De Wal, Richard Henricus Adrianus Van Lieshout, Henricus Martinus Johannes Van De Groes +1 more |
2016-07-05 |
| 9141004 |
Lithographic apparatus and method |
Johannes Petrus Martinus Bernardus Vermeulen, Johannes Antonius Gerardus Akkermans, Marinus Maria Johannes Van De Wal, Ruud Antonius Catharina Maria Beerens, Yang-Shan Huang |
2015-09-22 |
| 9081307 |
Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method |
Sven Antoin Johan Hol, Johannes Petrus Martinus Bernardus Vermeulen, George Wilhelmus Johannes Clijsen, Johannes Antonius Gerardus Akkermans, Jacob Kornelis Ter Veer +1 more |
2015-07-14 |