| 10990015 |
Debris mitigation system, radiation source and lithographic apparatus |
Michel Riepen, Paul Peter Anna Antonius Brom |
2021-04-27 |
| 10750604 |
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus |
Johan Frederik Dijksman, Wilhelmus Henricus Theodorus Maria Aangenent, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Peter van Putten |
2020-08-18 |
| 9964852 |
Source collector apparatus, lithographic apparatus and method |
Niek Antonius Jacobus Maria Kleemans, Denis Alexandrovich Glushkov, Benedictus Mathijs Renkens, Gerardus Hubertus Petrus Maria Swinkels, Christiaan Johannes Petrus Verspeek |
2018-05-08 |
| 9841680 |
Source collector apparatus, lithographic apparatus and method |
Niek Antonius Jacobus Maria Kleemans, Denis Alexandrovich Glushkov, Benedictus Mathijs Renkens, Gerardus Hubertus Petrus Maria Swinkels, Christiaan Johannes Petrus Verspeek |
2017-12-12 |
| 9715174 |
Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method |
Johan Frederik Dijksman, Ramin Badie, Dzmitry Labetski |
2017-07-25 |
| 9462667 |
Radiation source and lithographic apparatus |
Johan Frederik Dijksman, Antonius Theodorus Wilhelmus Kempen, Ramin Badie |
2016-10-04 |
| 8890099 |
Radiation source and method for lithographic apparatus for device manufacture |
Antonius Theodorus Wilhelmus Kempen, Bernard Van Essen |
2014-11-18 |
| 7764356 |
Lithographic apparatus and device manufacturing method |
Ton De Groot, Jacobus Johannus Leonardus Hendricus Verspay, Gerardus Everardus Marie Hannen |
2010-07-27 |
| 7446850 |
Lithographic apparatus and device manufacturing method |
Ton De Groot, Jacobus Johannus Leonardus Hendricus Verspay, Gerardus Everardus Marie Hannen |
2008-11-04 |
| 7136142 |
Lithographic apparatus having a gas flushing device |
Marcel Beckers, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Nicolaas Franciscus Koppelaars, Jan-Marius Schotsman +2 more |
2006-11-14 |
| 7106412 |
Lithographic apparatus comprising a gas flushing system |
Pieter Klaas De Bokx, Tjarko Adriaan Rudolf Van Empel, Adrianus Cornelius Antonius Jonkers |
2006-09-12 |