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Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen +3 more |
2024-08-27 |
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Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2022-07-05 |
| 11187991 |
Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen +3 more |
2021-11-30 |
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Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen +2 more |
2021-10-12 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2021-05-25 |
| 10990015 |
Debris mitigation system, radiation source and lithographic apparatus |
Paul Peter Anna Antonius Brom, Ronald Johannes Hultermans |
2021-04-27 |
| 10838310 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2020-11-17 |
| 10684554 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2020-06-16 |
| 10620544 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Fabrizio Evangelista |
2020-04-14 |
| 10488759 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2019-11-26 |
| 10451973 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2019-10-22 |
| 10394141 |
Radiation source and lithographic apparatus |
Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp, Jacob Brinkert +12 more |
2019-08-27 |
| 10353296 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2019-07-16 |
| 10268127 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2019-04-23 |
| 10254663 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2019-04-09 |
| 10216095 |
Immersion lithographic apparatus |
Christianus Wilhelmus Johannes Berendsen, Anton Alexander Darhuber, Hubertus Mattheus Joseph Maria Wedershoven, Josephus Catharina Henricus Zeegers |
2019-02-26 |
| 10209624 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Fabrizio Evangelista |
2019-02-19 |
| 10133190 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Cornelius Maria Rops |
2018-11-20 |
| 10095119 |
Radiation source and method for lithography |
Hendrikus Gijsbertus Schimmel, Reinier Theodorus Martinus Jilisen, Dennis De Graaf |
2018-10-09 |
| 10025196 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2018-07-17 |
| 10018921 |
Lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Nicolaas Rudolf Kemper |
2018-07-10 |
| 10018925 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi +4 more |
2018-07-10 |
| 9971255 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2018-05-15 |
| 9846372 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Fabrizio Evangelista |
2017-12-19 |
| 9753383 |
Radiation source and lithographic apparatus |
Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp, Jacob Brinkert +12 more |
2017-09-05 |