| 10394141 |
Radiation source and lithographic apparatus |
Michel Riepen, Dzmitry Labetski, Wim Ronald Kampinga, Jan Okke Nieuwenkamp, Jacob Brinkert +12 more |
2019-08-27 |
| 9753383 |
Radiation source and lithographic apparatus |
Michel Riepen, Dzmitry Labetski, Wim Ronald Kampinga, Jan Okke Nieuwenkamp, Jacob Brinkert +12 more |
2017-09-05 |
| 9648714 |
Fuel system for lithographic apparatus, EUV source, lithographic apparatus and fuel filtering method |
Gerardus Hubertus Petrus Maria Swinkels |
2017-05-09 |
| 9510432 |
Radiation source and lithographic apparatus |
Antonius Theodorus Wilhelmus Kempen, Johan Frederik Dijksman |
2016-11-29 |
| 9164403 |
Radiation source, lithographic apparatus and device manufacturing method |
Antonius Theodorus Wilhelmus Kempen, Richard Joseph Bruls, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels |
2015-10-20 |
| 9007560 |
Radiation source |
Gerardus Hubertus Petrus Maria Swinkels |
2015-04-14 |
| 8598551 |
EUV radiation source comprising a droplet accelerator and lithographic apparatus |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Erik Petrus Buurman |
2013-12-03 |