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Guiding device and associated system |
Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodrigues Nunes, Alexander I. Ershov, Kornelis Frits Feenstra, Igor V. Fomenkov +13 more |
2025-08-12 |
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Apparatus for and method of reducing contamination from source material in an EUV light source |
Yue Ma, Andrew David LaForge |
2024-01-16 |
| 11822252 |
Guiding device and associated system |
Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodreigues Nunes, Alexander I. Ershov, Kornelis Frits Feenstra, Igor V. Fomenkov +13 more |
2023-11-21 |
| 10955749 |
Guiding device and associated system |
Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodriges Nunes, Alexander I. Ershov, Kornelis Frits Feenstra, Igor V. Fomenkov +13 more |
2021-03-23 |
| 10394141 |
Radiation source and lithographic apparatus |
Michel Riepen, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp, Jacob Brinkert +12 more |
2019-08-27 |
| 10222701 |
Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method |
Chuangxin Zhao, Sander Baltussen, Pär Mårten Lukas Broman, Richard Joseph Bruls, Cristian Bogdan Craus +4 more |
2019-03-05 |
| 9753383 |
Radiation source and lithographic apparatus |
Michel Riepen, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp, Jacob Brinkert +12 more |
2017-09-05 |
| 9715174 |
Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method |
Johan Frederik Dijksman, Ramin Badie, Ronald Johannes Hultermans |
2017-07-25 |
| 9671698 |
Fuel stream generator, source collector apparatus and lithographic apparatus |
Hendrikus Gijsbertus Schimmel |
2017-06-06 |
| 9363879 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +4 more |
2016-06-07 |
| 9310689 |
Radiation source and lithographic apparatus |
Hendrikus Gijsbertus Schimmel, Johan Frederik Dijksman |
2016-04-12 |
| 9113539 |
Radiation source |
Hendrikus Gijsbertus Schimmel, Johan Frederik Dijksman |
2015-08-18 |
| 9091944 |
Source collector, lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Gerardus Hubertus Petrus Maria Swinkels, Sven Pekelder, Uwe Stamm +1 more |
2015-07-28 |
| 9013679 |
Collector mirror assembly and method for producing extreme ultraviolet radiation |
Erik Roelof Loopstra, Antonius Theodorus Wilhelmus Kempen |
2015-04-21 |
| 8901521 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +4 more |
2014-12-02 |
| 8755032 |
Radiation source and lithographic apparatus |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Vladimir Mihailovitch Krivtsun +1 more |
2014-06-17 |
| 8749756 |
Lithographic apparatus and device manufacturing method |
Yuri Johannes Gabriël Van De Vijver, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Hendrikus Gijsbertus Schimmel, Tjarko Adriaan Rudolf Van Empel |
2014-06-10 |
| 8711325 |
Method and system for determining a suppression factor of a suppression system and a lithographic apparatus |
Hendrikus Gijsbertus Schimmel, Tjarko Adriaan Rudolf Van Empel, Hans Johannes Maria Freriks, Yuri Johannes Gabriël Van De Vijver, Gerardus Hubertus Petrus Maria Swinkels +3 more |
2014-04-29 |
| 8405055 |
Source module, radiation source and lithographic apparatus |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels |
2013-03-26 |
| 8368032 |
Radiation source, lithographic apparatus, and device manufacturing method |
Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Tom Van Zutphen |
2013-02-05 |
| 8220315 |
Gas gauge, lithographic apparatus and device manufacturing method |
Yuri Johannes Gabriël Van De Vijver |
2012-07-17 |
| 8115900 |
Lithographic apparatus and device manufacturing method |
Yuri Johannes Gabriël Van De Vijver, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Hendrikus Gijsbertus Schimmel, Tjarko Adriaan Rudolf Van Empel |
2012-02-14 |