Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8711325 | Method and system for determining a suppression factor of a suppression system and a lithographic apparatus | Hendrikus Gijsbertus Schimmel, Tjarko Adriaan Rudolf Van Empel, Yuri Johannes Gabriël Van De Vijver, Gerardus Hubertus Petrus Maria Swinkels, Marc Antonius Maria Haast +3 more | 2014-04-29 |