| 11664264 |
Lithographic apparatus, method for unloading a substrate and method for loading a substrate |
Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE +11 more |
2023-05-30 |
| 11579533 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more |
2023-02-14 |
| 11385547 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Marcus Martinus Petrus Adrianus Vermeulen +6 more |
2022-07-12 |
| 10895808 |
Substrate holder, a lithographic apparatus and method of manufacturing devices |
Günes NAKIBOGLU, Coen Hubertus Matheus Baltis, Siegfried Alexander Tromp, Bert Dirk SCHOLTEN, Daan Daniel Johannes Antonius Van Sommeren +1 more |
2021-01-19 |
| 10705426 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Thibault Simon Mathieu Laurent, Marcus Martinus Petrus Adrianus Vermeulen +6 more |
2020-07-07 |
| 10571810 |
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus |
Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelius Paulus Melman +6 more |
2020-02-25 |
| 10534270 |
Lithography apparatus, a method of manufacturing a device and a control program |
Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more |
2020-01-14 |
| 10317804 |
Substrate table, lithographic apparatus and method of operating a lithographic apparatus |
Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman +6 more |
2019-06-11 |
| 10310394 |
Lithographic apparatus, a projection system and a device manufacturing method |
Johannes Hubertus Josephina Moors, Wendelin Johanna Maria Versteeg, Peter Gerardus Jonkers |
2019-06-04 |
| 10261422 |
Lithography apparatus and method of manufacturing a device |
Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more |
2019-04-16 |
| 9971254 |
Sensor, lithographic apparatus and device manufacturing method |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more |
2018-05-15 |
| 9753382 |
Sensor, lithographic apparatus and device manufacturing method |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more |
2017-09-05 |
| 9363879 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +4 more |
2016-06-07 |
| 8901521 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +4 more |
2014-12-02 |
| 8797504 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot, Oleg Viacheslavovich Voznyi +9 more |
2014-08-05 |
| 8749756 |
Lithographic apparatus and device manufacturing method |
Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Hendrikus Gijsbertus Schimmel, Dzmitry Labetski, Tjarko Adriaan Rudolf Van Empel |
2014-06-10 |
| 8730448 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Nicolaas Ten Kate, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot +11 more |
2014-05-20 |
| 8711325 |
Method and system for determining a suppression factor of a suppression system and a lithographic apparatus |
Hendrikus Gijsbertus Schimmel, Tjarko Adriaan Rudolf Van Empel, Hans Johannes Maria Freriks, Gerardus Hubertus Petrus Maria Swinkels, Marc Antonius Maria Haast +3 more |
2014-04-29 |
| 8220315 |
Gas gauge, lithographic apparatus and device manufacturing method |
Dzmitry Labetski |
2012-07-17 |
| 8115900 |
Lithographic apparatus and device manufacturing method |
Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels, Hendrikus Gijsbertus Schimmel, Dzmitry Labetski, Tjarko Adriaan Rudolf Van Empel |
2012-02-14 |
| 8094287 |
Lithographic appararus and method |
Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Antonius Johannes Van Der Net, Bernhard Gellrich, Bauke Jansen +1 more |
2012-01-10 |
| 7476491 |
Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured thereby |
Antonius Johannes Van Der Net, Paul Van Der Veen |
2009-01-13 |
| 7446849 |
Lithographic apparatus and device manufacturing method |
Tjarko Adriaan Rudolf Van Empel, Erik Roelof Loopstra, Antonius Johannes Van Der Net, Bernard Gellrich, Bauke Jansen +1 more |
2008-11-04 |