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Method and system for determining a suppression factor of a suppression system and a lithographic apparatus |
Hendrikus Gijsbertus Schimmel, Tjarko Adriaan Rudolf Van Empel, Hans Johannes Maria Freriks, Yuri Johannes Gabriël Van De Vijver, Gerardus Hubertus Petrus Maria Swinkels +3 more |
2014-04-29 |
| 8629418 |
Lithographic apparatus and sensor therefor |
Marcus Adrianus Van De Kerkhof, Haico Victor Kok, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest +3 more |
2014-01-14 |
| 8426831 |
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector |
Stoyan Nihtianov, Arie Johan Van Der Sijs, Bearrach Moest, Petrus Wilhelmus Josephus Maria Kemper, Gerardus Wilhelmus Petrus Baas +6 more |
2013-04-23 |
| 8138485 |
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector |
Stoyan Nihtianov, Arie Johan Van Der Sijs, Bearrach Moest, Petrus Wilhelmus Josephus Maria Kemper, Gerardus Wilhelmus Petrus Baas +6 more |
2012-03-20 |
| 7655367 |
Lithographic apparatus and device manufacturing method |
Erik Petrus Buurman, Thomas Josephus Maria Castenmiller, Johannes Wilhelmus Maria Cornelis Teeuwsen, Bearrach Moest |
2010-02-02 |
| 7586108 |
Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector |
Stoyan Nihtianov, Arie Johan Van Der Sijs, Bearrach Moest, Petrus Wilhelmus Josephus Maria Kemper, Gerardus Wilhelmus Petrus Baas +6 more |
2009-09-08 |
| 7453078 |
Sensor for use in a lithographic apparatus |
Haico Victor Kok, Marcus Adrianus Van De Kerhof, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest +3 more |
2008-11-18 |
| 7282701 |
Sensor for use in a lithographic apparatus |
Haico Victor Kok, Marcus Adrianus Van De Kerhof, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest +3 more |
2007-10-16 |
| 7145630 |
Lithographic apparatus and device manufacturing method |
Bearrach Moest, Marcus Adrianus Van De Kerkhof |
2006-12-05 |