| 11009800 |
Measurement system, lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Günes NAKIBOGLU, Rita Marguerite Albin Lambertine Petit, Hermen Folken Pen, Remco Yuri Van De Moesdijk +1 more |
2021-05-18 |
| 10580545 |
Beam delivery apparatus and method |
Vadim Yevgenyevich Banine, Petrus Rutgerus Bartraij, Ramon Pascal Van Gorkom, Lucas J. P. Ament, Pieter Willem Herman De Jager +11 more |
2020-03-03 |
| 10508951 |
High resolution broadband monolithic spectrometer and method |
Hedser Van Brug, Frerik VAN BEIJNUM |
2019-12-17 |
| 9823572 |
Lithographic method |
Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Gosse Charles De Vries, Erik Roelof Loopstra, Vadim Yevgenyevich Banine +8 more |
2017-11-21 |
| 9383490 |
Depolarizer, telescope and remote sensing device and method |
Huibert Visser, Michiel David Nijkerk |
2016-07-05 |
| 9304300 |
Anamorphotic telescope |
Huibert Visser, Michiel David Nijkerk |
2016-04-05 |
| 8873024 |
Illumination system for use in a stereolithography apparatus |
Jacobus Hubertus Theodoor Jamar, Herman Hendrikus Maalderink, Andries Rijfers, Jentske D. Kooistra |
2014-10-28 |
| 8836916 |
Illumination system for use in a stereolithography apparatus |
Jacobus Hubertus Theodoor Jamar, Andries Rijfers, Jentske D. Kooistra, Mark Herman Else Vaes |
2014-09-16 |
| 8717535 |
SLM calibration |
Huibert Visser, Martinus Hendricus Hoeks, Bob Streefkerk, Patricius Aloysius Jacobus Tinnemans, Erwin John Van Zwet +4 more |
2014-05-06 |
| 8629418 |
Lithographic apparatus and sensor therefor |
Marcus Adrianus Van De Kerkhof, Haico Victor Kok, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast +3 more |
2014-01-14 |
| 8559108 |
Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement system |
Martijn Gerard Dominique Wehrens, Michiel David Nijkerk, Kornelis Frits Feenstra |
2013-10-15 |
| 8237912 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
Herman Boom, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Huibert Visser, Peter Julian Pollard |
2012-08-07 |
| 7969549 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
Herman Boom, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Huibert Visser, Peter Julian Pollard |
2011-06-28 |
| 7453078 |
Sensor for use in a lithographic apparatus |
Haico Victor Kok, Marcus Adrianus Van De Kerhof, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast +3 more |
2008-11-18 |
| 7282701 |
Sensor for use in a lithographic apparatus |
Haico Victor Kok, Marcus Adrianus Van De Kerhof, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast +3 more |
2007-10-16 |
| 7023525 |
Imaging apparatus |
Arno Jan Bleeker, Pieter Willem Herman De Jager, Jason Hintersteiner, Matthew Eugene McCarthy, Mark Oskotsky +6 more |
2006-04-04 |
| 6778257 |
Imaging apparatus |
Arno Jan Bleeker, Pieter Willem Herman De Jager, Jason Hintersteiner, Matthew Eugene McCarthy, Mark Oskotsky +6 more |
2004-08-17 |
| 6498351 |
Illumination system for shaping extreme ultraviolet radiation used in a lithographic projection apparatus |
Isabel Escudero Sanz |
2002-12-24 |